JPH0186226U - - Google Patents
Info
- Publication number
- JPH0186226U JPH0186226U JP18166487U JP18166487U JPH0186226U JP H0186226 U JPH0186226 U JP H0186226U JP 18166487 U JP18166487 U JP 18166487U JP 18166487 U JP18166487 U JP 18166487U JP H0186226 U JPH0186226 U JP H0186226U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- reflecting mirror
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18166487U JPH0186226U (en]) | 1987-11-28 | 1987-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18166487U JPH0186226U (en]) | 1987-11-28 | 1987-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186226U true JPH0186226U (en]) | 1989-06-07 |
Family
ID=31473142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18166487U Pending JPH0186226U (en]) | 1987-11-28 | 1987-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186226U (en]) |
-
1987
- 1987-11-28 JP JP18166487U patent/JPH0186226U/ja active Pending
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